Hermetic Sealing of Crystal Device and MEMS

Features of seam welding

In seam welding, because the welded area per each welding is very small, low pressure and small welding current will be sufficient, which is suitable for ceramic package.
In seam welding, welding is made only to the plated layer. Therefore, the base material (kovar) will not be exposed to ambient air, resulting in stable operation over a long period of time.
Vacuum sealing, where seam welding is conducted in vacuum, is also possible.

Full automatic steam welder

Illustration of seam welding

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Micro-joining application: Seam welding of crystal devices and MEMS.

A lid (metal) is placed on a ceramic package, and hermetic sealing is achieved by seam welding.

Applicable machine models